ABOUT

Deliver Best Performance to Customer

To provide the customer with the valuable system based on the worldwide market-leading technology, striving for taking the maximum portion of the burden and responsibility of the customer by standing behind the system till the end of the chip production.

PRODUCT

BATCH PROCESSING

NEXTATION Manual is an advanced wet station that provides versatile process capabilities on an efficiently small footprint and covers up to 300 mm in wafer size, thin wafers, ICS, MEMS, LED, photo masks and glass substrates that use various process chemicals.

DRYER

NEO series is a most advanced Marangoni drying apparatus capable of efficient particle control on a nano-scale.

SINGLE WAFER PROCESSING

SPINEL single wafer process tool provides versatile autonomous process capabilities with particle control on a nano-scale, built on an efficiently small footprint and covers up to 300 mm in wafer size, thin wafers, ICS, MEMS, LED, photo masks and glass substrates that use various process chemicals.